Abstract: A newly developed positioning system incorporating a multidegree of freedom standing wave ultrasonic motor ~SWUM! is presented and its advantageous features, operating principles, and some experimental results are described. The principle of motorization is based on the conversion, through frictional contact, of a stationary bending vibration sustained in a slotted metallic resonator, into rigid body displacements. A small autonomous multidegree of freedom nanopositioner using a SWUM motor is presented for fine positioning in scanning tunneling microscopy. The positioning system is achieved via the simultaneous operation of two identical pulse width modulation servo-control systems, each having a laser vibrometer position feedback loop. The closed loop position schemes are theoretically considered and their results are demonstrated and evaluated in practice. Evaluations of experimental tests indicate that a positioning resolution less than 100 nm are successfully achieved for an unlimited X 2 Y travel range with linear speeds between 1 mm s21 and few cm/s.