
Materia Nova, R & D center
Parc Initialis
Avenue Nicolas Copernic, n°1
7000 Mons
Belgium
![]() | gregory.guisbiers@physics.org |
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G Guisbiers, S Strehle, O Van Overschelde, M Wautelet (2006) Residual stresses in Ta, Mo, Al and Pd thin films deposited by e-beam evaporation process on Si and Si/SiO2 substrates In: 8th International Workshop on Stress-Induced Phenomena in Metallization Edited by:E. Zschech, K. Maex, P.S. Ho, H. Kawasaki, T. Nakamura. 317
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