hosted by
publicationslist.org
mohamed
boufnichel
mohamed.boufnichel@gmail.com
Journal articles
2005
M Boufnichel
,
P Lefaucheux
,
S Aachboun
,
R Dussart
,
P Ranson
(2005)
Origin,
control
and
elimination
of
undercut
in
silicon
deep
plasma
etching
in
the
cryogenic
process
Microelectronic Engineering
77:
3-4.
327-336
APRIL
Abstract:
Notes:
Other
select all
|
select none
Selected
:
Delete selected items
Export selected items to:
bibtex
|
endnote
|
Procite (RIS)
|
Mods XML
Powered by
publicationslist.org
.
